EMMI
FIB Analysis Equipment
Helios G5 UC
Electron optics
• Source: Schottky FEG
• Acceleration Voltage: 350 V to 30 kV
• Resolution:
0.6 nm at 15 – 2 kV
0.7 nm at 1 kV (with Beam Deceleration)
1.0 nm at 500 V (with Beam Deceleration and ICD)
Ion optics
• Acceleration Voltage: 500 V to 30 kV
• Beam current: 1.1 pA – 100nA
• Resolution:
4.0 nm at 30 kV using preferred statistical method
2.5 nm at 30 kV using selective edge method
Integrated Plasma Cleaner
Ar+ Micropolisher
AutoTEM System
SEM & EDX Analysis Equipment
3D CT Analysis Equipment
CT Scanning & Metrology at Accuracy, Higher Speeds
• Industry-leading magnification at 300kV
• High-quality images via Scatter l correct technology
• High-speed scans
• Outstanding reliable metrology precision
X-RAY Analysis Equipment
Curve Tracer
Auto Stitching Optical Microscope
old way
• Manual method in which the person in charge of analysis directly separates images and then merges the images.
• Poor quality of the final image.
new way
• After taking an image of the size designated by the operator with Auto, the final image is derived.
• The final image is in excellent condition. (Image resolution is better than existing Olympus microscopes and Nikon microscopes)
• Auto image measurement of various types of samples such as tape or tray.
Optical Microscope
De-capsulation Equipment
Sample Preparation Equipment
